Simulate metal sealing;
Flow range: 10 sccm to 5 slm;
Accuracy: ≤± 1% FS;
Maximum intake pressure: 140 psi (981 kPa)
Aera FC-7700 series mass flowmeter from the United States

advantage:
high performance-price ratio
Fast response time: less than 2 seconds
Unparalleled reliability: Over one year of use, zero drift less than 0.5% of full scale
Easy to integrate: standard connectors and sizes
Outstanding effect: high-quality film layer and etching characteristics

characteristic
Non metallic sealing
VCR connection
Range from 10SCCM to 150SLM
Normally closed or normally open solenoid valve
Maximum allowable cleaning flow rate: up to 100 times the maximum calibration value
Leakage rate 1 × 10-6 atm cc/s (helium)

Detailed information of FC-7700 gas mass flowmeter:
The Aera FC-7700 series products from Adcane Energy are standard products that have been proven to be suitable for various applications. The flow meter adopts non-metallic sealing, precise flow control, and high cost-effectiveness. This product is designed for process and equipment engineers working in the semiconductor, flat panel display, data storage, industrial vacuum, and industrial coating markets. Additionally, this series of products demonstrates excellent reliability and performance in corrosive gas applications such as CVD, PVD, etching, ion implantation, sputtering, thermal oxidation, optical glass coating, fiber optics, surface treatment, and other coating processes.
High cost-effectiveness:
The FC-7700 series products are customized for applications that require top performance but do not require corrosion resistance or ultra-high leakage rate. They not only offer good cost performance, but also have very high control accuracy.
Fast response speed:
The FC-7700 series products are designed with the latest technology, and their performance is far superior to similar mass flow controllers MFC. Its advanced features include the use of a small diameter sensor with strong sensitivity and fast response speed. In addition, compared with similar products that use low-speed thermistor valves, the FC-7700 series products use normally open or normally closed solenoid valves, which have a faster response speed. After improving the response speed, overshoot was avoided and the set point was reached in less than 2 seconds - the fastest among all mass flow controller products with standard solenoid valves.
Unparalleled reliability:
With high-quality electronic components and a design concept that uses durable and minimal components, it can withstand strong RF field interference, meet other operational requirements, and has the best zero drift stability among similar products - after more than one year of use, the zero drift is less than 0.5% of the full range. Among the 25000 or more products put into use, less than 0.5% of them are repaired within one year of shipment.
Easy to integrate:
By replacing other brands, you can easily obtain the performance and reliability advantages of Area quality flow controllers without encountering installation difficulties. Specific models of products come with standard electrical connectors and critical dimensions, making them easy to install into existing systems.
Outstanding results:
The FC-7700 series quality flow controller not only brings you consistency in film and etching processes, but also high repeatability.
Model parameters:

If you need various brands and models of MFC, please contact me

Specifications

* N/O: Normally Open Valve Model, ** N/C: Normally Closed Valve Model

※1: Less than ±1% for Full Scale Flow greater than 30SLM

※2: 5～100% for Full Scale Flow greater than 150SLM

※3: 28～43 psiD for Full Scale Flow greater than 150SLM

Dimensions